Plasma parameters in 40 MHz Argon discharge
Experimental data related to 40 MHz Argon plasma parameters in the RF power and pressure ranges of 25–200 W and 0.2–0.5 Torr are presented. Electron temperatures are obtained using both double probe and optical spectroscopy methods. Acceptable consistency between results is obtained. Double probe me...
-д хадгалсан:
| Үндсэн зохиолчид: | , , |
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| Формат: | Artigo |
| Хэл сонгох: | Inglês |
| Хэвлэсэн: |
Elsevier
2015-01-01
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| Цуврал: | Results in Physics |
| Нөхцлүүд: | |
| Онлайн хандалт: | http://www.sciencedirect.com/science/article/pii/S2211379715000066 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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