Labeling Confidence Values for Wafer-Handling Robot Arm Performance Using a Feature-Based General Regression Neural Network and Genetic Algorithm

The prognosis and management of machine health statuses are emerging research topics. In this study, the performance degradation of a wafer-handling robot arm (WHRA) was predicted using the proposed machine-learning approach. This method considers the eccentric vertical and planar position deviation...

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Autors principals:	Yi-Cheng Huang, Zi-Sheng Yang, Hsien-Shu Liao
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2019-10-01
Col·lecció:	Applied Sciences
Matèries:	prognostic and health management wafer-handling robot arm feature extraction general regression neural network logistic regression
Accés en línia:	https://www.mdpi.com/2076-3417/9/20/4241
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