Facile Low-Temperature Deposition of Seedless Nanocrystalline Diamond Films from CH<sub>4</sub>/Ar Gas Mixtures
Nanocrystalline diamond (NCD) films were synthesized by microwave plasma chemical vapor deposition (MPCVD) from a CH<sub>4</sub>/Ar mixture on seedless p-type Si(111) substrates at 100–400 °C. Crystallinity was evaluated by X-ray diffraction (Cu Kα); bonding by Raman spectroscopy and X-ray photoelec...
Wedi'i Gadw mewn:
| Prif Awduron: | , , , , , , , , , , |
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| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
MDPI AG
2025-12-01
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| Cyfres: | Crystals |
| Pynciau: | |
| Mynediad Ar-lein: | https://www.mdpi.com/2073-4352/16/1/10 |
| Tagiau: |
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