Inhomogeneities across boron-doped nanocrystalline diamond films
For large-scale device fabrication, information about film inhomogeneities is crucial for high fabrication yield. In this work, inhomogeneities in two-inch diameter heavily boron-doped nanocrystalline diamond (BNCD) films have been studied. Two BNCD films were grown using chemical vapour deposition...
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| Principais autores: | , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Elsevier
2024-06-01
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| Serier: | Carbon Trends |
| Fag: | |
| Online adgang: | http://www.sciencedirect.com/science/article/pii/S2667056924000348 |
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