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Assembly and Bilayer Liftoff of Periodic Nanostructures with Sub-20 nm Resolution Using Thermal Scanning Probe Lithography

The demands for high resolution fabrication processes are ever-increasing, with new and optimized methodologies being highly relevant across several scientific fields. We systematically investigated thermal scanning probe lithography process and detailed how tuning temperature and probe contact time...

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Principais autores: Paloma E. S. Pellegrini, Silvia V. G. Nista, Stanislav Moshkalev
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2024-09-01
Serier:Nanomanufacturing
Fag:
thermal scanning probe lithography
bilayer liftoff
nanostructures
nanofabrication
Online adgang:https://www.mdpi.com/2673-687X/4/3/12
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