Assembly and Bilayer Liftoff of Periodic Nanostructures with Sub-20 nm Resolution Using Thermal Scanning Probe Lithography
The demands for high resolution fabrication processes are ever-increasing, with new and optimized methodologies being highly relevant across several scientific fields. We systematically investigated thermal scanning probe lithography process and detailed how tuning temperature and probe contact time...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2024-09-01
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| Colecção: | Nanomanufacturing |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2673-687X/4/3/12 |
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