High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator

This paper reports a high accuracy oil-filled MEMS absolute pressure sensor based on quartz crystal double-ended tuning fork (DETF) resonator, which is suitable for application in ocean, petroleum, meteorological, aerospace and spacecraft field, etc. The pressure sensing unit is mainly composed of D...

Descrición completa

Detalles Bibliográficos

Principais autores:	J. Wang, C. Zhao, D. X. Han, X. F. Jin, S. M. Zhang, J. B. Zou, M. M. Wang, W. B. Li, Y. B. Guo
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2017-08-01
Series:	Proceedings
Assuntos:	MEMS pressure sensor high accuracy quartz crystal resonator
Acceso en liña:	https://www.mdpi.com/2504-3900/1/4/379
Tags:	Engadir etiqueta Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!