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Effect of Working Gas on the Thermal Stability and Mechanical Property of Hydrogenated DLC Coatings

In order to reveal the influence of working gas on DLC coating and provide reference for the application of DLC at high temperature, different hydrogen-containing diamond-like carbon films(a-C:H)were prepared on 304 stainless steel substrate by plasma-enhanced chemical vapor deposition(PE-CVD)with d...

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Bibliografische gegevens
Hoofdauteur: BI Jun, PENG Ji-hua, LI Lie-jun, ZHOU Feng
Formaat: Artigo
Taal:Chinês
Gepubliceerd in: Editorial Department of Materials Protection 2021-06-01
Reeks:Cailiao Baohu
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Online toegang:http://www.mat-pro.com/fileup/1001-1560/PDF/20210603.pdf
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