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Effect of Working Gas on the Thermal Stability and Mechanical Property of Hydrogenated DLC Coatings

In order to reveal the influence of working gas on DLC coating and provide reference for the application of DLC at high temperature, different hydrogen-containing diamond-like carbon films(a-C:H)were prepared on 304 stainless steel substrate by plasma-enhanced chemical vapor deposition(PE-CVD)with d...

Täydet tiedot

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Bibliografiset tiedot
Päätekijä: BI Jun, PENG Ji-hua, LI Lie-jun, ZHOU Feng
Aineistotyyppi: Artigo
Kieli:Chinês
Julkaistu: Editorial Department of Materials Protection 2021-06-01
Sarja:Cailiao Baohu
Aiheet:
Linkit:http://www.mat-pro.com/fileup/1001-1560/PDF/20210603.pdf
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