Fluorination of CVD graphene films by inductively coupled plasma CF4
Synthesis of nanometer-thick dielectric films is one of the key tasks in nano- and optoelectronics, which is associated with growing requirements for miniaturization and functionality of devices. This paper presents the results of a study of optical and electrical properties of graphene fluorinated...
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| Autores principales: | , |
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| Formato: | Artigo |
| Lenguaje: | Russo |
| Publicado: |
Tver State University
2025-12-01
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| Colección: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
| Materias: | |
| Acceso en línea: | https://physchemaspects.ru/2025/doi-10-26456-pcascnn-2025-17-109/?lang=en |
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