Design and Evaluation of a Capacitive Micromachined Ultrasonic Transducer(CMUT) Linear Array System for Thickness Measurement of Marine Structures Under Varying Environmental Conditions

This paper presents the design, fabrication, and experimental evaluation of a capacitive micromachined ultrasonic transducer (CMUT) linear array for non-contact thickness measurement of marine engineering structures. A 16-element CMUT array was fabricated using a silicon–silicon wafer bonding proces...

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Principais autores:	Changde He, Mengke Luo, Hanchi Chai, Hongliang Wang, Guojun Zhang, Renxin Wang, Jiangong Cui, Yuhua Yang, Wendong Zhang, Licheng Jia
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2025-07-01
Series:	Micromachines
Assuntos:	MEMS CMUT array sensitivity time of flight (ToF) thickness detection
Acceso en liña:	https://www.mdpi.com/2072-666X/16/8/898
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