Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range

A Micro Electro-Mechanical System (MEMS) that allows to measure an external force applied to a probe tip exploiting an electrical servo-assisted mechanism based on position feedback is presented. The sensor architecture keeps the position of the probe tip fixed by driving a pair of variable-area ele...

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Главные авторы:	Alessandro Nastro, Marco Ferrari, Alfio-Lip Russo, Raffaele Ardito, Vittorio Ferrari
Формат:	Artigo
Язык:	Inglês
Опубликовано:	MDPI AG 2017-08-01
Серии:	Proceedings
Предметы:	servo-assisted force sensor MEMS sub-nanonewton range tunable sensitivity
Online-ссылка:	https://www.mdpi.com/2504-3900/1/4/383
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