Servo-Assisted Position-Feedback MEMS Force Sensor with Tunable Sensitivity and Sub-Nanonewton Range
A Micro Electro-Mechanical System (MEMS) that allows to measure an external force applied to a probe tip exploiting an electrical servo-assisted mechanism based on position feedback is presented. The sensor architecture keeps the position of the probe tip fixed by driving a pair of variable-area ele...
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| Huvudupphov: | , , , , |
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| Materialtyp: | Artigo |
| Språk: | Inglês |
| Utgiven: |
MDPI AG
2017-08-01
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| Serie: | Proceedings |
| Ämnen: | |
| Länkar: | https://www.mdpi.com/2504-3900/1/4/383 |
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