Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications

Electrothermal actuators are highly advantageous for microelectromechanical systems (MEMS) due to their capability to generate significant force and large displacements. Despite these benefits, their application in reconfigurable conduction line switches is limited, particularly when employing comme...

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Hlavní autoři:	Abdurrashid Hassan Shuaibu, Almur A. S. Rabih, Yves Blaquière, Frederic Nabki
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2024-10-01
Edice:	Micromachines
Témata:	electrothermal actuator microelectromechanical systems (MEMS) PiezoMUMPs DC MEMS switch Si-to-Si contact resistance
On-line přístup:	https://www.mdpi.com/2072-666X/15/11/1295
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