Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications
Electrothermal actuators are highly advantageous for microelectromechanical systems (MEMS) due to their capability to generate significant force and large displacements. Despite these benefits, their application in reconfigurable conduction line switches is limited, particularly when employing comme...
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| Principais autores: | , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
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MDPI AG
2024-10-01
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| Serier: | Micromachines |
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| Online adgang: | https://www.mdpi.com/2072-666X/15/11/1295 |
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