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Normally closed thermally activated irreversible solid state erbium hydrides switches

A thermally driven, micrometer-scale switch technology has been created that utilizes the ErH3/Er2O3 materials system. The technology is comprised of novel thin film switches, interconnects, on-board micro-scale heaters for passive thermal environment sensing, and on-board micro-scale heaters for in...

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Principais autores: Michael J. Abere, Richard J. Gallegos, Matthew W. Moorman, Mark A. Rodriguez, Paul G. Kotula, Rick A. Kellogg, David P. Adams
Formato: Artigo
Idioma:Inglês
Publicado: Elsevier 2024-06-01
Series:Micro and Nano Engineering
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Acceso en liña:http://www.sciencedirect.com/science/article/pii/S2590007224000066
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