Normally closed thermally activated irreversible solid state erbium hydrides switches
A thermally driven, micrometer-scale switch technology has been created that utilizes the ErH3/Er2O3 materials system. The technology is comprised of novel thin film switches, interconnects, on-board micro-scale heaters for passive thermal environment sensing, and on-board micro-scale heaters for in...
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| Главные авторы: | , , , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
Elsevier
2024-06-01
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| Серии: | Micro and Nano Engineering |
| Предметы: | |
| Online-ссылка: | http://www.sciencedirect.com/science/article/pii/S2590007224000066 |
| Метки: |
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