Normally closed thermally activated irreversible solid state erbium hydrides switches
A thermally driven, micrometer-scale switch technology has been created that utilizes the ErH3/Er2O3 materials system. The technology is comprised of novel thin film switches, interconnects, on-board micro-scale heaters for passive thermal environment sensing, and on-board micro-scale heaters for in...
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| Autores principales: | , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Elsevier
2024-06-01
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| Colección: | Micro and Nano Engineering |
| Materias: | |
| Acceso en línea: | http://www.sciencedirect.com/science/article/pii/S2590007224000066 |
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