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Stitching Interferometry for X-Ray Mirror Metrology at the Hefei Advanced Light Facility (HALF)

The advancements in the 4th-generation synchrotron radiation light sources, characterized by their enhanced coherence and brightness, have led to more stringent requirements for the surface quality of X-ray mirrors used in beamlines. This poses a significant challenge to the metrology of X-ray mirro...

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Hlavní autoři: Yanghui Wang, Yifan Zhao, Huiyun Wang, Yiyang Hu, Liang He, Shuai Zhao, Xuewei Du
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI AG 2025-11-01
Edice:Photonics
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On-line přístup:https://www.mdpi.com/2304-6732/12/11/1106
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