Structural Design and Testing of a Micromechanical Resonant Accelerometer
Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage. However, there is a high-order nonlinear relationship between the output frequency and the induced acceleration, so it is di...
Uloženo v:
| Hlavní autoři: | , , |
|---|---|
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
MDPI AG
2022-08-01
|
| Edice: | Micromachines |
| Témata: | |
| On-line přístup: | https://www.mdpi.com/2072-666X/13/8/1271 |
| Tagy: |
Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!
|