Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer
There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance. This paper introduces the principle of an in-plane vibration micromechanical resonant accelerometer with electrostatic...
Na minha lista:
| Principais autores: | , , |
|---|---|
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI AG
2022-09-01
|
| Serier: | Micromachines |
| Fag: | |
| Online adgang: | https://www.mdpi.com/2072-666X/13/10/1612 |
| Tags: |
Ingen Tags, Vær først til at tagge denne postø!
|