Structural Design and Testing of a Micromechanical Resonant Accelerometer
Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage. However, there is a high-order nonlinear relationship between the output frequency and the induced acceleration, so it is di...
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| Autori principali: | , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2022-08-01
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| Serie: | Micromachines |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2072-666X/13/8/1271 |
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