Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer

There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance. This paper introduces the principle of an in-plane vibration micromechanical resonant accelerometer with electrostatic...

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Bibliographic Details

Main Authors:	Heng Liu, Jiale Wu, Yu Zhang
Format:	Artigo
Language:	Inglês
Published:	MDPI AG 2022-09-01
Series:	Micromachines
Subjects:	resonant accelerometer constant amplitude frequency tracking loop coupling averaging method
Online Access:	https://www.mdpi.com/2072-666X/13/10/1612
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