Evaluation of Periodic Nonlinear Error in a Directly Traceable Grating Interferometer

Periodic nonlinear error (PNE) is a key factor limiting the accuracy of displacement measurement instruments. For grating interferometers, which are widely used in high-precision displacement measurement, reliable characterization of PNE is essential. Conventional evaluation methods that rely on hig...

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Bibliografske podrobnosti

Principais autores:	Wenjia Xu, Zichao Lin, Song Song, Chunling He, Yaao Yang, Guangxu Xiao, Xiao Deng
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2025-12-01
Serija:	Photonics
Teme:	directly traceable grating interferometer periodic nonlinear error Cr atom lithography grating self-evaluation method Heydemann correction nanometric measurement
Online dostop:	https://www.mdpi.com/2304-6732/12/12/1209
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