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Evaluation of Periodic Nonlinear Error in a Directly Traceable Grating Interferometer

Periodic nonlinear error (PNE) is a key factor limiting the accuracy of displacement measurement instruments. For grating interferometers, which are widely used in high-precision displacement measurement, reliable characterization of PNE is essential. Conventional evaluation methods that rely on hig...

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Príomhchruthaitheoirí: Wenjia Xu, Zichao Lin, Song Song, Chunling He, Yaao Yang, Guangxu Xiao, Xiao Deng
Formáid: Artigo
Teanga:Inglês
Foilsithe / Cruthaithe: MDPI AG 2025-12-01
Sraith:Photonics
Ábhair:
Rochtain ar líne:https://www.mdpi.com/2304-6732/12/12/1209
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