Self-traceable angle standards with simplified traceability chain for dimensional metrology

Traceability is a fundamental issue for ensuring accuracy of nanometrology. A shortened traceability chain is advantageous for reducing calibration steps, thus reducing errors and raising application efficiency. A novel kind of two-dimensional grating is manufactured by atom lithography, whose pitch...

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Detalhes bibliográficos

Principais autores:	Xiao Deng, Junyu Shen, Yingfan Xiong, Jinming Gou, Zhaohui Tang, Guangxu Xiao, Zhijun Yin, Dongbai Xue, Yushu Shi, Zhoumiao Shi, Yuying Xie, Xinbin Cheng, Tongbao Li
Formato:	Artigo
Idioma:	Inglês
Publicado em:	IOP Publishing 2024-01-01
Colecção:	Applied Physics Express
Assuntos:	dimensional metrology shortened angle traceability chain atom lithography 2D self-traceable grating SEM calibration
Acesso em linha:	https://doi.org/10.35848/1882-0786/ad87a9
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