Tuning the Mechanical and Antibacterial Properties of ZrO<sub>2</sub> Thin Films by Varying Deposition Angle and Orientation for Biomedical Applications
This paper investigates the properties of zirconium oxide thin films deposited on Ti6Al4V and Si substrates via oblique angle deposition, using varying out-of-plane θ (15 to 85°) and in-plane Φ (0 and 180°) substrate orientations. ZrO<sub>2</sub> films have garnered significant interest due to their...
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| Autori principali: | , , , , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2026-01-01
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| Serie: | Micro |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2673-8023/6/1/4 |
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