Tuning the Mechanical and Antibacterial Properties of ZrO₂ Thin Films by Varying Deposition Angle and Orientation for Biomedical Applications

This paper investigates the properties of zirconium oxide thin films deposited on Ti6Al4V and Si substrates via oblique angle deposition, using varying out-of-plane θ (15 to 85°) and in-plane Φ (0 and 180°) substrate orientations. ZrO₂ films have garnered significant interest due to their...

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Bibliografische gegevens

Hoofdauteurs:	Asma Gzaiel, Khalil Aouadi, Aurélien Besnard, Yoann Pinot, Corinne Nouveau, Faker Bouchoucha, Yahya Agzenai Ben Salem, Amina Guessabi, Boudjemaa Bouaouina
Formaat:	Artigo
Taal:	Inglês
Gepubliceerd in:	MDPI AG 2026-01-01
Reeks:	Micro
Onderwerpen:	ZrO<sub>2</sub> thin films oblique angle deposition (OAD) microstructure mechanical properties morphology antibacterial properties
Online toegang:	https://www.mdpi.com/2673-8023/6/1/4
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