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Tuning the Mechanical and Antibacterial Properties of ZrO<sub>2</sub> Thin Films by Varying Deposition Angle and Orientation for Biomedical Applications

This paper investigates the properties of zirconium oxide thin films deposited on Ti6Al4V and Si substrates via oblique angle deposition, using varying out-of-plane θ (15 to 85°) and in-plane Φ (0 and 180°) substrate orientations. ZrO<sub>2</sub> films have garnered significant interest due to their...

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Principais autores: Asma Gzaiel, Khalil Aouadi, Aurélien Besnard, Yoann Pinot, Corinne Nouveau, Faker Bouchoucha, Yahya Agzenai Ben Salem, Amina Guessabi, Boudjemaa Bouaouina
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2026-01-01
Serier:Micro
Fag:
ZrO<sub>2</sub> thin films
oblique angle deposition (OAD)
microstructure
mechanical properties
morphology
antibacterial properties
Online adgang:https://www.mdpi.com/2673-8023/6/1/4
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