A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection
This paper presents the design, fabrication, and electrical characterization of an electrostatically actuated and capacitive sensed 2-MHz plate resonator structure that exhibits a predicted mass sensitivity of ~250 pg·cm−2·Hz−1. The resonator is embedded in a fully on-chip...
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| Главные авторы: | , , , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI AG
2018-09-01
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| Серии: | Micromachines |
| Предметы: | |
| Online-ссылка: | http://www.mdpi.com/2072-666X/9/10/484 |
| Метки: |
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