A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process
This paper presents a micromachined micro-g capacitive accelerometer with a silicon-based spring-mass sensing element. The displacement changes of the proof mass are sensed by an area-variation-based capacitive displacement transducer that is formed by the matching electrodes on both the movable pro...
Sábháilte in:
| Príomhchruthaitheoirí: | , , , , , , |
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| Formáid: | Artigo |
| Teanga: | Inglês |
| Foilsithe / Cruthaithe: |
MDPI AG
2019-06-01
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| Sraith: | Micromachines |
| Ábhair: | |
| Rochtain ar líne: | https://www.mdpi.com/2072-666X/10/6/380 |
| Clibeanna: |
Níl clibeanna ann, Bí ar an gcéad duine le clib a chur leis an taifead seo!
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