Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor
We developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the el...
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| Autori principali: | , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2024-04-01
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| Serie: | Proceedings |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2504-3900/97/1/128 |
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