Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor
We developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the el...
Na minha lista:
| Principais autores: | , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2024-04-01
|
| coleção: | Proceedings |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2504-3900/97/1/128 |
| Tags: |
Sem tags, seja o primeiro a adicionar uma tag!
|