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Micromecanizado mediante láseres de femtosegundos de cerámicas LTCC. Fabricación de microcalentadores para un sensor de monóxido de carbono

In present work, the processability of LTCC (Low Temperature Co-fired Ceramics) by means of femtosecond laser ablation is shown. This kind of material, with a clear technological interest in the development of microsensors, possesses a high mechanical fragility in the sintered state and, consequentl...

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Autori principali: Gómez, David, Goenaga, Igor, Johander, Per, Moldovan, Carmen
Natura: Artigo
Lingua:Inglês
Pubblicazione: Elsevier 2007-08-01
Serie:Boletín de la Sociedad Española de Cerámica y Vidrio
Soggetti:
LTCC ceramics
laser micromachining
gas sensors
Cerámicas LTCC
micromecanizado láser
sensores de gas
Accesso online:http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/236/249
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