Phase Measuring Deflectometry for Wafer Thin-Film Stress Mapping
Wafer-level thin-film stress measurement is essential for reliable semiconductor fabrication. However, existing techniques present limitations in practice. Interferometry achieves high precision but at a cost that becomes prohibitive for large wafers. Meanwhile laser-scanning systems are more afford...
I tiakina i:
| Ngā kaituhi matua: | , , , , , |
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| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
MDPI AG
2025-12-01
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| Rangatū: | Sensors |
| Ngā marau: | |
| Urunga tuihono: | https://www.mdpi.com/1424-8220/25/24/7668 |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
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