Power Optimization of TiNiHf/Si Shape Memory Microactuators
We present a novel design approach for the power optimization of cantilever-based shape memory alloy (SMA)/Si bimorph microactuators as well as their microfabrication and in situ characterization. A major concern upon the miniaturization of SMA/Si bimorph microactuators in conventional double-beam c...
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| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2023-02-01
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| coleção: | Actuators |
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| Acesso em linha: | https://www.mdpi.com/2076-0825/12/2/82 |
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