Power Optimization of TiNiHf/Si Shape Memory Microactuators

We present a novel design approach for the power optimization of cantilever-based shape memory alloy (SMA)/Si bimorph microactuators as well as their microfabrication and in situ characterization. A major concern upon the miniaturization of SMA/Si bimorph microactuators in conventional double-beam c...

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Bibliografiske detaljer

Principais autores:	Gowtham Arivanandhan, Zixiong Li, Sabrina M. Curtis, Lisa Hanke, Eckhard Quandt, Manfred Kohl
Format:	Artigo
Sprog:	Inglês
Udgivet:	MDPI AG 2023-02-01
Serier:	Actuators
Fag:	shape memory films TiNiHf films bimorph shape memory microactuators design optimization
Online adgang:	https://www.mdpi.com/2076-0825/12/2/82
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