Squared PMUT with Enhanced Pressure Sensitivities
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be mono...
Enregistré dans:
| Auteurs principaux: | , , , , , , , |
|---|---|
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI AG
2018-11-01
|
| Collection: | Proceedings |
| Sujets: | |
| Accès en ligne: | https://www.mdpi.com/2504-3900/2/13/925 |
| Tags: |
Pas de tags, Soyez le premier à ajouter un tag!
|