Squared PMUT with Enhanced Pressure Sensitivities
This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be mono...
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| Autori principali: | , , , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2018-11-01
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| Serie: | Proceedings |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2504-3900/2/13/925 |
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