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Development of 1 700 V SiC SBD Device

It presented the structure design, manufacture technology and static performance test of 1 700 V SiC SBD devices. The epitaxy material structure and device structure were obtained by simulation,two key processes including passivation and metalation were analyzed and optimized. Forward and reverse st...

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Autori principali: SHI Jingjing, ZHOU Zhengdong, GAO Yunbin, WU Jia
Natura: Artigo
Lingua:Chinês
Pubblicazione: Editorial Office of Control and Information Technology 2016-01-01
Serie:Kongzhi Yu Xinxi Jishu
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Accesso online:http://ctet.csrzic.com/thesisDetails#10.13889/j.issn.2095-3631.2016.05.010
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