Diagnostics of low-pressure capacitively coupled RF discharge argon plasma
Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation c...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
University of Baghdad
2019-02-01
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| Col·lecció: | Iraqi Journal of Physics |
| Matèries: | |
| Accés en línia: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/266 |
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