Characterization of Boron Coatings Produced by RF Planar Magnetron Sputtering

Boron coatings were deposited by RF magnetron sputtering in an Ar atmosphere at a constant power of 80 W, varying the working pressure in the 0.6–5 Pa range. Plasma diagnostics were performed by means of a Langmuir probe to determine the electron temperature and electron density under different oper...

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Principais autores:	Espedito Vassallo, Matteo Pedroni, Miriam Saleh, Dario Ripamonti, Giorgio Speranza
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2026-03-01
Series:	Surfaces
Assuntos:	RF-plasma sputtering boron coatings Langmuir probe SEM AFM XPS
Acceso en liña:	https://www.mdpi.com/2571-9637/9/2/31
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