Characterization of Boron Coatings Produced by RF Planar Magnetron Sputtering
Boron coatings were deposited by RF magnetron sputtering in an Ar atmosphere at a constant power of 80 W, varying the working pressure in the 0.6–5 Pa range. Plasma diagnostics were performed by means of a Langmuir probe to determine the electron temperature and electron density under different oper...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2026-03-01
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| coleção: | Surfaces |
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| Acesso em linha: | https://www.mdpi.com/2571-9637/9/2/31 |
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