Partially Etched Piezoelectric Film Filled with SiO₂ Structure Applied to A1 Mode Resonators for Transverse Modes Suppression

With the arrival of the Fifth Generation (5G) communication era, there has been an urgent demand for acoustic filters with a high frequency and ultrawide bandwidth used in radio-frequency (RF) front-ends filtering and signal processing. First-order antisymmetric (A1) lamb mode resonators based on Li...

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Bibliografiske detaljer

Principais autores:	Zhenyi Yu, Yu Guo, Sulei Fu, Baichuan Li, Peisen Liu, Shuai Zhang, Zongqin Sun
Format:	Artigo
Sprog:	Inglês
Udgivet:	MDPI AG 2023-09-01
Serier:	Micromachines
Fag:	A1 mode resonator transverse modes suppression partially etched piezoelectric film comparison finite element method
Online adgang:	https://www.mdpi.com/2072-666X/14/9/1745
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