Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO₃/SiO₂/Poly-Si/Si Substrate for Improved Performance and Miniaturization

A SAW device with a multi-layered piezoelectric substrate has excellent performance due to its high Q value. A multi-layer piezoelectric substrate combined with phononic crystal structures capable of acoustic wave reflection with a very small array can achieve miniaturization and high performance. I...

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Detalles Bibliográficos

Principais autores:	Panliang Tang, Hongzhi Pan, Temesgen Bailie Workie, Jia Mi, Jingfu Bao, Ken-ya Hashimoto
Formato:	Artigo
Idioma:	Inglês
Publicado:	MDPI AG 2024-10-01
Series:	Micromachines
Assuntos:	multi-layered structure phononic crystals conventional SAW resonator reflective grating
Acceso en liña:	https://www.mdpi.com/2072-666X/15/10/1256
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