Development of a Novel MEMS Gas Flowmeter with a Temperature Difference Suspension Structure

Micro-electro-mechanical system (MEMS) gas flowmeters are innovative devices that use microfabrication technology to measure gas flow with high precision and sensitivity. With MEMS technology, flow measurement can now be performed more accurately and compactly than ever, using low-power, compact, an...

Celý popis

Podrobná bibliografie

Hlavní autoři:	Basit Abdul, Abdul Qadeer, Abdul Rab Asary
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2024-11-01
Edice:	Engineering Proceedings
Témata:	micro-flowmeter MEMS thermal resistor suspended structure weak signal acquisition high-resolution ADC
On-line přístup:	https://www.mdpi.com/2673-4591/82/1/118
Tagy:	Přidat tag Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!