Development of a Novel MEMS Gas Flowmeter with a Temperature Difference Suspension Structure
Micro-electro-mechanical system (MEMS) gas flowmeters are innovative devices that use microfabrication technology to measure gas flow with high precision and sensitivity. With MEMS technology, flow measurement can now be performed more accurately and compactly than ever, using low-power, compact, an...
Furkejuvvon:
| Váldodahkkit: | , , |
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| Materiálatiipa: | Artigo |
| Giella: | Inglês |
| Almmustuhtton: |
MDPI AG
2024-11-01
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| Ráidu: | Engineering Proceedings |
| Fáttát: | |
| Liŋkkat: | https://www.mdpi.com/2673-4591/82/1/118 |
| Fáddágilkorat: |
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