Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Zirconium nitride (ZrN) is widely used in many industrial sectors for its outstanding performances including its mechanical properties, high chemical and thermal stability. Associated with its plasmonic behavior, these properties make ZrN a suitable candidate for optical applications at high tempera...

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Autors principals:	V. Vallejo-Otero, N. Crespo-Monteiro, A. Valour, C. Donnet, S. Reynaud, N. Ollier, M.F. Blanc Mignon, J.P. Chatelon, Y. Bleu, E. Gamet, Y. Jourlin
Format:	Artigo
Idioma:	Inglês
Publicat:	Elsevier 2023-12-01
Col·lecció:	Materials Today Advances
Matèries:	Zirconium nitride Sol-gel method Rapid thermal nitridation Optical properties Micro-nanostructuring
Accés en línia:	http://www.sciencedirect.com/science/article/pii/S2590049823000905
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