Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Zirconium nitride (ZrN) is widely used in many industrial sectors for its outstanding performances including its mechanical properties, high chemical and thermal stability. Associated with its plasmonic behavior, these properties make ZrN a suitable candidate for optical applications at high tempera...

Description complète

Détails bibliographiques

Auteurs principaux:	V. Vallejo-Otero, N. Crespo-Monteiro, A. Valour, C. Donnet, S. Reynaud, N. Ollier, M.F. Blanc Mignon, J.P. Chatelon, Y. Bleu, E. Gamet, Y. Jourlin
Format:	Artigo
Langue:	Inglês
Publié:	Elsevier 2023-12-01
Collection:	Materials Today Advances
Sujets:	Zirconium nitride Sol-gel method Rapid thermal nitridation Optical properties Micro-nanostructuring
Accès en ligne:	http://www.sciencedirect.com/science/article/pii/S2590049823000905
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!