Innovative process to obtain thin films and micro-nanostructured ZrN films from a photo-structurable ZrO2 sol-gel using rapid thermal nitridation

Zirconium nitride (ZrN) is widely used in many industrial sectors for its outstanding performances including its mechanical properties, high chemical and thermal stability. Associated with its plasmonic behavior, these properties make ZrN a suitable candidate for optical applications at high tempera...

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Principais autores:	V. Vallejo-Otero, N. Crespo-Monteiro, A. Valour, C. Donnet, S. Reynaud, N. Ollier, M.F. Blanc Mignon, J.P. Chatelon, Y. Bleu, E. Gamet, Y. Jourlin
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	Elsevier 2023-12-01
סדרה:	Materials Today Advances
נושאים:	Zirconium nitride Sol-gel method Rapid thermal nitridation Optical properties Micro-nanostructuring
גישה מקוונת:	http://www.sciencedirect.com/science/article/pii/S2590049823000905
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